Surface acoustic wave sensors

被引：69
|
作者：
Shiokawa, S
Kondoh, J
机构：
[1] A&R Ctr Surface Wave Technol, Hamamatsu, Shizuoka 4328561, Japan
[2] Shizuoka Univ, Fac Engn, Dept Syst Engn, Hamamatsu, Shizuoka 4328561, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 5B期
关键词：
acoustic wave sensor; SAW sensor; liquid phase sensor; SH-SAW sensor; acoustoelectric interaction;
D O I：
10.1143/JJAP.43.2799
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Acoustic wave sensors are highly sensitive in detecting the properties of solid or fluid materials in contact with their surfaces, including the surface mass change, liquid density, liquid viscosity and electrical conductivity. In this paper, primarily, the commonly used acoustic wave sensors are reviewed and their mass sensitivities are compared. The fundamentals of the sensing system using the shear horizontal surface acoustic wave (SH-SAW) sensor on a 36degrees rotated Y-cut X-propagating LiTaO3 are described. Since the high sensitivity of the electrical perturbation is a significant advantage of the SH-SAW sensor, its applications based on acoustoelectric interaction are also presented.
引用
收藏
页码：2799 / 2802
页数：4
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