A novel nano-probe design in silicon and gallium-based alloys using photonic crystals

被引:0
|
作者
Dillon, Thomas [1 ]
Martin, Rick [2 ]
Shi, Shouyuan [1 ]
Sharkawy, Ahmed [2 ]
Prather, Dennis [1 ]
机构
[1] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA
[2] EM Photon INC, Newark, DE 19711 USA
关键词
near-field microscopy; SNOM; nano-probe; photonic crystal; optical data storage;
D O I
10.1117/12.681077
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
in this paper we demonstrate the design, fabrication, and characterization of a near-field photonic crystal nano-probe. By exploiting the ability of photonic crystals to strongly confine and guide light, we are able to produce optical spot sizes that are well below the diffraction limit. This offers in particular the advantage of higher resolution as compared to conventional optical probing techniques, while retaining the desirable features of speed, non-invasiveness, reliability, and low cost. Such a device has applications in scanning near-field optical microscopy (SNOM), nanolithography, high density optical data storage, and many other technologies. We describe the implementation of a photonic crystal device in the silicon-on-insulator (SOI) platform, as well as discuss progress being made in gallium-based alloys to further reduce the wavelength of operation and therefore the probe spot size.
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页数:8
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