Crystal growth and liquid-phase epitaxy of gallium nitride

被引:18
|
作者
Klemenz, C [1 ]
Scheel, HJ [1 ]
机构
[1] Swiss Fed Inst Technol, Inst Micro & Optoelect, CH-1007 Lausanne, Switzerland
关键词
gallium nitride; liquid-phase epitaxy; substrates;
D O I
10.1016/S0022-0248(99)00831-3
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
With the recognition of the importance of the structural perfection of GaN films for highest performance devices, the growth of GaN bulk crystals or thick GaN layers to he used as substrates as well as high-quality epitaxial layers is considered with increased interest. The different approaches are discussed. GaN films were grown by liquid-phase epitaxy (LPE) on (0 0 0 1)sapphire, on (0 0 1)LiGaO2, on (1 0 0)LiAlO2, and on vapor-grown GaN seed films from Ga(1) at 900 degrees C. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:62 / 67
页数:6
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