Synthesis of ZnO Nanocrystals in SiO2/Si Track Template: Effect of Electrodeposition Parameters on Structure

This paper presents a study of nanoclusters obtained by electrochemical deposition (ECD) of zinc in the a-SiO2/Si-n track template. The nanoporous SiO2 layer on Si substrate (track template) has been created by irradiation with swift Xe ions and further etching in HF solution. The morphology of SiO2/Si-n track templates and precipitated Zn-based clusters are examined using a scanning electron microscope JSM 7500F. The crystallographic structure of the Zn-based precipitates was investigated by means of X-ray diffraction (XRD). X-ray analysis is carried out on a D8 ADVANCE ECO X-ray diffractometer. The Bruker AXSDIFFRAC.EVAv.4.2 software and the international ICDD PDF-2 database are used to identify the phases and study the crystal structure. From XRD data, it has been found the formation of three crystalline phases of zinc oxide nanocrystals electro-deposited into SiO2/Si track template: wurtzite, sphalerite, and rock salt structures. Wurtzite is obtained on an amorphous surface of silicon dioxide. Possible mechanisms of ZnO formation instead of metal Zn nanocrystals are discussed.