A novel high-resolution mapping method of d-spacing and lattice plane orientation

被引：0
|
作者：
Zhang, XW [1 ]
Okada, Y [1 ]
Sugiyama, H [1 ]
Ando, M [1 ]
机构：
[1] High Energy Accelerator Res Org, KEK, Photon Factory, Tsukuba, Ibaraki 3050801, Japan
来源：
SYNCHROTRON RADIATION INSTRUMENTATION | 2004年 / 705卷
关键词：
D O I：
10.1063/1.1757992
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We have developed a fast and stable measuring system of lattice spacing with precision of 10(-8) for a silicon crystal at the Photon Factory. Using a combination of this system with an autocollimator, we can not only measure d-spacing, but also can determine lattice plane orientation with sub-arcsec resolution in the same measurement process. We report a mapping measurement of a Boron-doped CZ silicon wafer with 1 mm(2) spatial resolution.
引用
收藏
页码：1106 / 1109
页数：4
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