共 50 条
- [41] LOW-TEMPERATURE FLUORINATION OF GAAS SURFACE BY CF4 PLASMA JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (07): : 1581 - 1584
- [46] CF AND CF2 ACTINOMETRY IN A CF4/AR PLASMA JOURNAL OF APPLIED PHYSICS, 1992, 71 (07) : 3186 - 3192