Pull-In Voltage Calculation of Various Shaped Micro-Cantilevers

Microelectromechanical system (MEMS) is the technology of miniaturization. Micro Actuators are one of the MEMS components which provide movement in the device i.e. mechanically active. Now a days devices are getting smaller and smaller in size which affects the pull-in voltage. This paper helps in analyzing the different structure of cantilever based on electrostatic actuation and also help in deciding which cantilever structure is good for the application. These cantilevers can be used as a switch in many applications. This paper presents the change in pull-in voltage with the change in length, width, thickness, gap & material property. Simulation has been carried out using Intellisuite software version 8.6.