Fluctuations in the process plant as a quality assessment criterion of low-temperature plasma hardening process

被引：1

作者：

Martynov, V. ^{[1
]}

Brzhozovsky, B. ^{[1
]}

Zinina, E. ^{[1
]}

Yankin, I. ^{[1
]}

Susskiy, A. ^{[1
]}

机构：

[1] Yuri Gagarin State Tech Univ Saratov, Politech Skaya 77, Saratov 410000, Russia

来源：

PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON DYNAMICS AND VIBROACOUSTICS OF MACHINES (DVM2016) | 2017年 / 176卷

基金：

俄罗斯科学基金会;

关键词：

low-temperature plasma; hardening; working chamber; mechanical fluctuations; electric fluctuations; displacement current; plasma cloud; accumulated ripple; Student's t-test;

D O I：

10.1016/j.proeng.2017.02.344

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The paper presents the results of experimental studies of the vibrational processes in low temperature plasma hardening. The relationship between the pulsations of a plasma cloud, generator electrical fluctuations of microwave energy and the mechanical fluctuations of the working chamber process plant has been established. On the basis of these results the work makes the conclusion about the need to monitor the process to ensure its quality, and the possibility of using statistical methods of processing data on displacement current based on the test of the hypothesis on the presence of this trend in its signal. (C) 2017 The Authors. Published by Elsevier Ltd.

引用

页码：451 / 460

页数：10

共 50 条

[21] PROPERTIES OF BN FILMS PRODUCED BY A LOW-TEMPERATURE DOUBLE-PLASMA PROCESS
SCHMOLLA, W
HARTNAGEL, HL
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (08) : L95 - L98
[22] FORMATION OF HIGH-QUALITY SILICON-OXIDE BY A LOW-TEMPERATURE PROCESS
NANJO, J
YAMAMOTO, H
SAWADA, T
HASEGAWA, H
DENKI KAGAKU, 1983, 51 (05): : 440 - 444
[23] LOW-TEMPERATURE OXIDATION PROCESS FOR RECOVERY OF BITUMEN
CRAM, PJ
REDFORD, DA
JOURNAL OF CANADIAN PETROLEUM TECHNOLOGY, 1977, 16 (03): : 72 - 83
[24] Low-temperature purification process of metallurgical silicon
Zhao Li-xin
Wang Zhi
Guo Zhan-cheng
Li Cheng-yi
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2011, 21 (05) : 1185 - 1192
[25] Low-temperature smectite illitization as a biomineral process
Krinari, GA
Khramchenkov, MG
DOKLADY EARTH SCIENCES, 2005, 403 (06) : 926 - 930
[26] TOSCOAL PROCESS FOR LOW-TEMPERATURE PYROLYSIS OF COAL
CARLSON, FB
YARDUMIA.LH
ATWOOD, MT
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1973, : 17 - &
[27] LOW-TEMPERATURE THERMAL PROCESS FOR DECOMPOSITION OF WATER
ABRAHAM, BM
SCHREINER, F
SCIENCE, 1973, 180 (4089) : 959 - 960
[28] ALUMINA CATALYSTS IN LOW-TEMPERATURE CLAUS PROCESS
PEARSON, MJ
INDUSTRIAL & ENGINEERING CHEMISTRY PRODUCT RESEARCH AND DEVELOPMENT, 1977, 16 (02): : 154 - 158
[29] THERMOACTIVATIONAL ANALYSIS OF LOW-TEMPERATURE CREEP PROCESS
YAROSHEVICH, VD
VLADIMIROVA, GV
FIZIKA METALLOV I METALLOVEDENIE, 1974, 37 (03): : 504 - 510
[30] SHAFTWORK TARGETS FOR LOW-TEMPERATURE PROCESS DESIGN
LINNHOFF, B
DHOLE, VR
CHEMICAL ENGINEERING SCIENCE, 1992, 47 (08) : 2081 - 2091

← 1 2 3 4 5 →