Fluctuations in the process plant as a quality assessment criterion of low-temperature plasma hardening process

The paper presents the results of experimental studies of the vibrational processes in low temperature plasma hardening. The relationship between the pulsations of a plasma cloud, generator electrical fluctuations of microwave energy and the mechanical fluctuations of the working chamber process plant has been established. On the basis of these results the work makes the conclusion about the need to monitor the process to ensure its quality, and the possibility of using statistical methods of processing data on displacement current based on the test of the hypothesis on the presence of this trend in its signal. (C) 2017 The Authors. Published by Elsevier Ltd.