Optical Feedback Interferometry for Raster Scan Profilometry

被引：0

作者：

Grimaldi, Bastien ^{[1
]}

Arriaga, Antonio Luna ^{[1
]}

Bony, Francis ^{[1
]}

Tronche, Clement ^{[1
]}

Perchoux, Julien ^{[1
]}

机构：

[1] Univ Toulouse, CNRS, INPT, LAAS CNRS, Toulouse, France

来源：

2017 IEEE SENSORS | 2017年

关键词：

Laser sensor; profilometry; optical feedback inter-ferometry; LASER;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper evaluates optical feedback interferometry for raster scan profilometry applications. It is shown both experimentally and theoretically that the spot size on target plays a major role as the phase distribution of the scattering contributions impacts drastically the sensor signal.

引用

页码：1134 / 1136

页数：3

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