Optical Feedback Interferometry for Raster Scan Profilometry

被引：0
|
作者：
Grimaldi, Bastien [1 ]
Arriaga, Antonio Luna [1 ]
Bony, Francis [1 ]
Tronche, Clement [1 ]
Perchoux, Julien [1 ]
机构：
[1] Univ Toulouse, CNRS, INPT, LAAS CNRS, Toulouse, France
来源：
2017 IEEE SENSORS | 2017年
关键词：
Laser sensor; profilometry; optical feedback inter-ferometry; LASER;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper evaluates optical feedback interferometry for raster scan profilometry applications. It is shown both experimentally and theoretically that the spot size on target plays a major role as the phase distribution of the scattering contributions impacts drastically the sensor signal.
引用
收藏
页码：1134 / 1136
页数：3
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