Nanostructure imaging via multi-energy deconvolution SEM

被引：0
|
作者：
Johlin, Eric [1 ]
de Goede, Michiel [1 ,2 ]
Sciacca, Beniamino [1 ]
Boughorbel, Faysal [3 ]
Garnett, Erik [1 ]
机构：
[1] FOM Inst AMOLF, Amsterdam, Netherlands
[2] Univ Twente, Enschede, Netherlands
[3] FEI Co, Eindhoven, Netherlands
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2017年 / 253卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
1576
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页数：1
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