共 50 条
- [41] Recent progress in direct patterning technologies based on nano-imprint lithography EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2012, 59 (01):
- [42] Patterning nonflat substrates with a low pressure, room temperature, imprint lithography process JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06): : 2162 - 2172
- [44] Step and flash imprint lithography: A new approach to high-resolution patterning EMERGING LITHOGRAPHIC TECHNOLOGIES III, PTS 1 AND 2, 1999, 3676 : 379 - 389