Silicon-on-insulator guided-wave structures for thermo-optic switching applications

被引：2
|
作者：
Rendina, I
Cocorullo, G
DellaCorte, FG
机构：
来源：
SILICON-BASED MONOLITHIC AND HYBRID OPTOELECTRONIC DEVICES | 1997年 / 3007卷
关键词：
silicon optoelectronics; optical modulators; thermo-optic effect; thermal analysis;
D O I：
10.1117/12.273853
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A theoretical study aimed at the optimum design of thermo-optic guided-wave switches realized in silicon-on-oxide technology is reported. The heat transfer processes occurring inside such devices are analyzed by means of a 3-D finite element thermal simulator. In particular, in rib waveguiding structures, we demonstrate that the optimum values of the oxide layer thickness and of the outer rib height are a function of the heating pulse power used to drive the device. The theoretical results carried out are consistent with the experiments reported in literature.
引用
收藏
页码：22 / 29
页数：8
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