Laser-assisted micro-forming process with miniaturised structures in sapphire dies

被引:17
|
作者
Samm, K. [1 ]
Terzi, M. [2 ]
Ostendorf, A. [3 ]
Wulfsberg, J. [2 ]
机构
[1] Laser Zentrum Hannover eV, D-30419 Hannover, Germany
[2] Univ Bundeswehr Hamburg, Helmut Schmidt Univ, Lab Fertigungstech, D-22043 Hamburg, Germany
[3] Ruhr Univ Bochum, Lehrstuhl Laseranwendungstech, D-44801 Bochum, Germany
关键词
Laser treatment; Sapphire dies; Miniaturisation; Micro-forming; Size effects;
D O I
10.1016/j.apsusc.2009.04.100
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Current results will be presented on developing and miniaturising a novel laser-assisted forming process to manufacture microstructures in metals such as stainless steel and aluminum. Due to its mechanical and optical properties, sapphire is a well-suited material for the micro-forming tool. Because of its high band gap, radiation with small wavelengths in the UV range is required to reach the ablation threshold. Thus, excimer lasers are used for manufacturing the microstructures. On the other hand, its high transmittance for higher wavelengths allows heating of the work-piece through the sapphire die during the micro-forming process, which allows a better form filling. The main goal of these investigations is to identify the scaling effects on micro-formed structures that result from miniaturising microstructures on dies for the development of strategies to overcome obstacles caused by these miniaturisation effects. (C) 2009 Elsevier B. V. All rights reserved.
引用
收藏
页码:9830 / 9834
页数:5
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