共 30 条
- [21] Large-area high-density plasma excitation using standing pure and hybrid surface waves Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1998, 16 (03): : 1537 - 1541
- [24] THE WAVE-GUIDE SURFATRON - A HIGH-POWER SURFACE-WAVE LAUNCHER TO SUSTAIN LARGE-DIAMETER DENSE-PLASMA COLUMNS JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (11): : 1356 - 1361
- [26] Obtaining high rates for the etching and ashing for large liquid-crystal display substrates by using a surface-wave plasma source ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 2004, 87 (06): : 28 - 38