High-energy electrons near the dielectric-plasma boundary in a large-area surface-wave plasma excited at 915 MHz

被引:12
|
作者
Nagatsu, M [1 ]
Niwa, T
Sugai, H
机构
[1] Shizuoka Univ, Dept Elect & Elect Engn, Fac Engn, Hamamatsu, Shizuoka 4328561, Japan
[2] Nagoya Univ, Dept Elect Engn, Grad Sch Engn, Nagoya, Aichi 4648603, Japan
关键词
D O I
10.1063/1.1506186
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-energy electrons produced in a planar ultrahigh frequency surface-wave plasma excited at 915 MHz have been studied using the Druyvesteyn technique of Langmuir probe measurements. Near the dielectric-plasma boundary, the hump of energetic electrons was clearly observed in the electron energy probability functions. The hump steeply shifted its center energy from about 20 eV at z=0.2 cm to almost zero at zsimilar to1.4 cm apart from the quartz window, while the bulk electrons were strongly heated there. Peak energy and width of the hump seemed to have a strong spatial correlation with the electric field intensities. (C) 2002 American Institute of Physics.
引用
收藏
页码:1966 / 1968
页数:3
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