Optical emission spectroscopy and Langmuir probe characterisation of the plasma during high-pressure sputter deposition of high-Tc superconducting YBa2Cu3O7-x thin films

被引：4

作者：

Tsaneva, VN ^{[1
]}

Popov, TK

Dias, FM

Tarte, EJ

Blamire, MG

Evetts, JE

Barber, ZH

机构：

[1] Univ Cambridge, Dept Mat Sci & Met, Cambridge, England

[2] Univ Cambridge, Interdisciplinary Res Ctr Superconduct, Cambridge, England

[3] IST, Ctr Fis Plasmas, Lisbon, Portugal

[4] Univ Sofia, Fac Phys, BU-1126 Sofia, Bulgaria

[5] Bulgarian Acad Sci, Inst Elect, Sofia, Bulgaria

来源：

VACUUM | 2002年 / 69卷 / 1-3期

关键词：

high-T-c superconducting (HTS) thin films; sputtering; Langmuir probe; optical emission spectroscopy (OES);

D O I：

10.1016/S0042-207X(02)00342-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Langmuir probe measurements and optical emission spectroscopy have been performed during high-pressure d.c. on axis sputter deposition of YBa2Cu3O7-x films. An advanced experimental method for probe data analysis has been used for three-dimensional mapping of the electron temperature. T-e, and density, n(e), of the plasma in the gap between the sputtering target and the heated substrate. Comparison of the ionic and atomic optical emission has illustrated the influence of small gas additions (H-2 and He) on plasma temperature. The results can be correlated with the properties of deposited YBa2Cu3O7-x films. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：261 / 266

页数：6

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