Micromachined diffuse nozzle elements for valve-less pumps

被引：13
|
作者：
Olsson, A [1 ]
Stemme, G [1 ]
Stemme, E [1 ]
机构：
[1] ROYAL INST TECHNOL,DEPT SIGNALS SENSORS & SYST,S-10044 STOCKHOLM,SWEDEN
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.494011
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：378 / 383
页数：6
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