Effect of ion treatment on the structure and optical properties of nanocrystalline In2O3:Sn films

被引：1

作者：

Vetoshkin, V. M. ^{[1
]}

Zakirova, R. M. ^{[1
]}

Kostenkov, N. V. ^{[1
]}

Krylov, P. N. ^{[1
]}

机构：

[1] Udmurt State Univ, Izhevsk, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES | 2012年 / 6卷 / 01期

关键词：

Neutron Technique; Indium Oxide; Condensation Temperature; Transparent Conductive Film; Indium Oxide Film;

D O I：

10.1134/S1027451012020176

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Transparent conductive films of indium oxide doped with tin have been obtained by the reactive RF-magnetron sputtering method with ion treatment of the specimen during film condensation. Ion treatment of the oxide surface during the sputtering process leads to the formation of a preferred crystallite orientation, a decrease in the size of the coherent reflection areas and an increase in the optical transparency window.

引用

页码：111 / 114

页数：4

共 50 条

[21] Role of deposition temperature and Sn content on structural, optical & electrical properties of In2O3 thin films
Khan, Afroz
Rahman, F.
Nongjai, Razia
Asokan, K.
CURRENT APPLIED PHYSICS, 2022, 38 : 49 - 58
[22] Effect of Tungsten Doping on the Properties of In2O3 Films
Krishnan, R. Reshmi
Kavitha, V. S.
Chalana, S. R.
Prabhu, Radhakrishna
Pillai, V. P. Mahadevan
JOM, 2019, 71 (05) : 1885 - 1896
[23] Effect of Tungsten Doping on the Properties of In2O3 Films
R. Reshmi Krishnan
V. S. Kavitha
S. R. Chalana
Radhakrishna Prabhu
V. P. Mahadevan Pillai
JOM, 2019, 71 : 1885 - 1896
[24] Optical properties of In2O3 films prepared by spray pyrolysis
Prathap, P.
Subbaiah, Y. P. V.
Devika, M.
Reddy, K. T. Ramakrishna
MATERIALS CHEMISTRY AND PHYSICS, 2006, 100 (2-3) : 375 - 379
[25] Microstructure, electrical and optoelectronic characterizations of transparent conductive nanocrystalline In2O3:Sn thin films
Varnamkhasti, Mohsen Ghasemi
Soleimanian, V.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2015, 26 (05) : 3223 - 3230
[26] Effect of nitrogen annealing on the structural, optical and photoluminescence properties of In2O3 thin films
Beji, Nasreddine
Reghima, Meriem
Souli, Mehdi
Turki, Najoua Kamoun
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 675 : 231 - 235
[27] Effect of Annealing on Structural and Optical Properties of Cu Doped In2O3 Thin Films
Kaleemulla, S. '
Rao, N. Madhusudhana
Krishna, N. Sai
Kuppan, M.
Begam, M. Rigana
Shobana, M.
JOURNAL OF NANO- AND ELECTRONIC PHYSICS, 2013, 5 (04)
[28] Effect of ytterbium doping on the optical and electrical properties of intrinsic In2O3 thin films
Dakhel, A. A.
MICROELECTRONICS RELIABILITY, 2010, 50 (02) : 211 - 216
[29] Transport and gas sensing properties of In2O3 nanocrystalline thick films: A Hall effect based approach
Oprea, A.
Gurlo, A.
Barsan, N.
Weimar, U.
SENSORS AND ACTUATORS B-CHEMICAL, 2009, 139 (02) : 322 - 328
[30] PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING
FAN, JCC
BACHNER, FJ
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) : 1719 - 1725

← 1 2 3 4 5 →