Effect of ion treatment on the structure and optical properties of nanocrystalline In2O3:Sn films

被引：1

作者：

Vetoshkin, V. M. ^{[1
]}

Zakirova, R. M. ^{[1
]}

Kostenkov, N. V. ^{[1
]}

Krylov, P. N. ^{[1
]}

机构：

[1] Udmurt State Univ, Izhevsk, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES | 2012年 / 6卷 / 01期

关键词：

Neutron Technique; Indium Oxide; Condensation Temperature; Transparent Conductive Film; Indium Oxide Film;

D O I：

10.1134/S1027451012020176

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Transparent conductive films of indium oxide doped with tin have been obtained by the reactive RF-magnetron sputtering method with ion treatment of the specimen during film condensation. Ion treatment of the oxide surface during the sputtering process leads to the formation of a preferred crystallite orientation, a decrease in the size of the coherent reflection areas and an increase in the optical transparency window.

引用

页码：111 / 114

页数：4

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