Effect of Air Gap on Uniformity of Large-Scale Surface-Wave Plasma

The effect of air gap on the uniformity of large-scale surface-wave plasma (SWP) in a rectangular chamber device is studied by using three-dimensional numerical analyses based on the finite difference time-domain (FDTD) approximation to Maxwell's equations and plasma fluid model. The spatial distributions of surface wave excited by slot-antenna array and the plasma parameters such as electron density and temperature are presented. For different air gap thicknesses, the results show that the existence of air gap would severely weaken the excitations of the surface wave and thereby the SWP. Thus the air gap should be eliminated completely in the design of the SWP source, which is opposite to the former research results.