Electrochemical co-deposition of gallium and antimonide from the 1-butyl-1-methylpyrrolidinium dicyanamide room temperature ionic liquid

被引:13
|
作者
Hsieh, Yi-Ting [1 ]
Liu, Yi-Chen [2 ]
Lo, Nai-Chang [2 ]
Lin, Wei-Jan [2 ]
Sun, I-Wen [2 ]
机构
[1] Soochow Univ, Dept Chem, Taipei 11102, Taiwan
[2] Natl Cheng Kung Univ, Dept Chem, Tainan 701, Taiwan
关键词
GaSb film; Ionic liquid; Semiconductors; COMPOUND SEMICONDUCTORS; INDIUM-ANTIMONIDE; ELECTRODEPOSITION; CHLORIDE; GROWTH; GASB; ANTIMONY(III); DEPOSITION; DIFFUSION;
D O I
10.1016/j.jelechem.2018.10.034
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Low temperature electrodeposition of Ga-Sb film is investigated from the 1-butyl-1-methylpyrrolidinium di-cyanamide room temperature ionic liquid containing anhydrous GaCl3 and SbCl3. Voltammetry shows that the redox potential of Ga(III)/Ga is more negative than that of the Sb(III)/Sb. While the deposited Sb can be easily anodized, the deposited Ga is difficult to oxidize. Electrodeposition of Ga-Sb films are attempted at various potentials and temperatures in solutions containing different Ga(III)/Sb(III) concentration ratios. To obtain GaSb film with a Ga:Sb ratio of 1:1 the electrolyte must contains a Ga(III) concentration higher than that of Sb(III). Scanning electron microscopy, energy dispersive X-ray analysis and X-ray photoelectron spectroscopy are used to characterize the morphologies, composition and the chemical bonding of the deposited GaSb films.
引用
收藏
页码:48 / 54
页数:7
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