Structure of layered WSe2 thin films with ultralow thermal conductivity

被引:12
|
作者
Kim, Seongwon [1 ,2 ]
Zuo, Jian Min [1 ,2 ]
Nguyen, Ngoc T. [3 ]
Johnson, David C. [3 ]
Cahill, David G. [1 ,2 ]
机构
[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, F Seitz Mat Res Lab, Urbana, IL 61801 USA
[3] Univ Oregon, Dept Chem, Eugene, OR 97403 USA
关键词
D O I
10.1557/JMR.2008.0124
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Crystallographic ordering and defects in WSe(2) thin films with ultralow thermal conductivity are characterized by electron imaging and diffraction in cross-sectional geometry. The results show that the film consists of oriented, coherent crystallites that are a few nanometers in diameter. Two films of different thickness with different thermal conductivity are compared. We show that the film with a lower thermal conductivity is characterized by less coherent crystallites with a greater degree of misorientation.
引用
收藏
页码:1064 / 1067
页数:4
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