共 47 条
- [42] Fast and Reliable Measurement of Thin Film Thickness Profile Based on Wavelet Transform in Spectrally Resolved White-Light Interferometry International Journal of Precision Engineering and Manufacturing, 2018, 19 : 213 - 219
- [43] Research of optical fiber sense-based online detection technology of the thickness of offset lithographic dampening film PROCEEDINGS OF THE 2006 IEEE/ASME INTERNATIONAL CONFERENCE ON MECHATRONIC AND EMBEDDED SYSTEMS AND APPLICATIONS, 2006, : 11 - +
- [44] Non-contact online thickness measurement system for metal films based on eddy current sensing with distance tracking technique REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (04):
- [46] Measurement of ultra low film stress, local stress distribution and flatness by imaging nanotopography based on low coherence phase shifting interferometry in conjunction with wafer and film thickness metrology ADVANCED CHARACTERIZATION TECHNIQUES FOR OPTICS, SEMICONDUCTORS, AND NANOTECHNOLOGIES III, 2007, 6672