Efficient gas lasers pumped by the generators with inductive energy storage

Laser and discharge parameters in mixtures of rare gases with halogens driven by a pre-pulse-sustainer circuit technique are studied. Inductive energy storage with semiconductor opening switch was used for the high-voltage pre-pulse formation. It was shown that the pre-pulse with a high amplitude and short rise-time along with sharp increase of discharge current and uniform UV- and x-ray preionization allow to form long-lived stable discharge in halogen containing gas mixtures. Improvement of both pulse duration and output energy was achieved for XeCl-, XeF-, KrCl- and KrF excimer lasers. Maximal laser output was as high as 1 J at efficiency up to 4%. Increase both of the radiation power and laser pulse duration were achieved in N-2-NF3 (SF6) and He-F-2 (NF3) gas mixtures, as well.