Micro-machining workstation for a diode pumped Nd:YAG high-brightness laser system

被引：4
|
作者：
Kleijhorst, RA
Offerhaus, HL
Bant, P
机构：
[1] NCLR BV, NL-7500 CR Enschede, Netherlands
[2] ILT BV, NL-7547 TG Enschede, Netherlands
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1998年 / 69卷 / 05期
关键词：
D O I：
10.1063/1.1148908
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Nd:YAG micro-machining workstation that allows cutting on a scale of a few microns has been developed and operated. The system incorporates a telescope viewing system that allows control during the work and a software interface to translate AutoCad files. Some examples of the performance are given. With this setup we demonstrate the possibility of machining within a few microns with a Nd:YAG laser. (C) 1998 American Institute of Physics.
引用
收藏
页码：2118 / 2119
页数：2
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