Transparent electrode for UV light-emitting-diodes

被引:5
|
作者
Takehara, Kosuke [1 ]
Takeda, Kenichiro [1 ]
Nagata, Kengo [1 ]
Sakurai, Hisashi [1 ]
Ito, Shun [1 ]
Iwaya, Motoaki [1 ]
Takeuchi, Tetsuya [1 ]
Kamiyama, Satoshi [1 ]
Akasaki, Isamu [1 ]
Amano, Hiroshi [2 ]
机构
[1] Meijo Univ, Fac Sci & Technol, Nagoya, Aichi, Japan
[2] Nagoya Univ, Grad Sch Engn, Akasaki Res Ctr, Nagoya, Aichi, Japan
来源
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 7-8 | 2011年 / 8卷 / 7-8期
关键词
UV-LED; ITO; transparent electrode;
D O I
10.1002/pssc.201001148
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have investigated the transparent electrodes using indium tin oxide (ITO) for UV light-emitting diodes (LEDs). The carrier concentration of ITO was increased from 1.1x10(18) to 1.5x10(21) cm(-3) after annealing under N-2 ambient at 600 degrees C. The fundamental absorption edge was also shifted to a shorter wavelength owing to the increase in carrier concentration, through the so-called the Burstein-Moss effect. The annealed ITO forms an ohmic contact with p-GaN with a specific contact resistance of 1.2x10(-3) Omega cm(2). The light output power of a 350 nm LED with the annealed ITO contact is 1.2 times higher than that with a conventional Ni/Au contact. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:2375 / 2377
页数:3
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