共 50 条
- [35] Stability Experiments on MEMS Aluminum Nitride RF Resonators RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS AND NANODEVICES IX, 2010, 7592
- [37] Sintered aluminum nitride ceramics for high-power electronic applications JOM, 1998, 50 : 56 - 60
- [38] Sintered aluminum nitride ceramics for high-power electronic applications JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY, 1998, 50 (06): : 56 - 60
- [40] Aluminum nitride thin film growth and applications for heat dissipation SURFACE & COATINGS TECHNOLOGY, 2015, 267 : 65 - 69