Long lifetime operation of an ArF-excimer laser

被引：8
|
作者：
Saito, T
Ito, S
Tada, A
机构：
来源：
APPLIED PHYSICS B-LASERS AND OPTICS | 1996年 / 63卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An experimental investigation to improve the lifetime of a discharge-excited ArF-excimer laser is presented. The three dominant factors restricting its lifetime are CF4 generation in the laser gas, color-center formation in the optics and input power density reduction due to electrode ablation. Copper electrodes were superior to nickel electrodes in regard to electrode ablation. A gas lifetime of more than 10(9) shots (about one month at 400 Hz) is shown for an ArF-excimer laser with a liquid-nitrogen trap and high-temperature zirconium alloy trap.
引用
收藏
页码：229 / 235
页数：7
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