Plasma enhanced chemical vapor deposition of mixed hydrocarbon/fluorocarbon thin films with a compositional gradient

被引：0
|
作者：
Tompkins, Brendan [1 ]
Fisher, Ellen R. [1 ]
机构：
[1] Colorado State Univ, Dept Chem, Ft Collins, CO 80523 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2011年 / 242卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
160-COLL
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页数：1
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