Control of a digital micromirror device using input shaping

In this paper, an open-loop control strategy is proposed for maneuvering the angular motion of a Digital Micromirror Device (DMD). The control law is based on a micromirror model that accounts for both bending and torsion motions. The model characterizes two DMD configurations: with and without contact with the substrate. The device is actuated using an electrostatic field which is a nonlinear function of the states and input voltage. The proposed control strategy is a Zero Vibration (ZV) shaper. It overshoots the DMD to its desired final angle by appropriately varying two independent input voltages. Actuating voltages and switching times are determined to maneuver the DMD from -10 degrees to +10 degrees tilt angles while reducing the residual vibrations.