Specific properties of undoped and Sb doped sol-gel deposited SnO2 layers

被引:1
|
作者
Chatelon, JP [1 ]
Terrier, C [1 ]
Blanchin, MG [1 ]
Mugnier, J [1 ]
Roger, JA [1 ]
机构
[1] UNIV LYON 1,LAB PHYSICOCHIM MAT LUMINESCENTS,UMR CNRS 5620,F-69622 VILLEURBANNE,FRANCE
关键词
sol-gel; tin oxide; antimony; thin film; electrical properties; optical properties; morphology;
D O I
10.4028/www.scientific.net/MSF.239-241.81
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
SnO2 layers, 100 to 500 nm thick, are deposited on various substrates using the sol-gel dip-coating (SGDC) method, the pulling solutions being prepared from alkoxides. Several characterization techniques are used (XPS and SIMS analysis, HRTEM observations, M-lines experiments...) in order to analyse the material as a function of elaboration parameters. This paper summarizes optical and electrical properties, and more precisely compares these specific properties of the SGDC material to those observed on SnO2 films elaborated by other techniques such as spray pyrolysis or CVD. The high quality of SGDC SnO2 is highlighted by the fact that the layers can be operated as optical waveguide, and M-lines experiments allow refractive index determination.
引用
收藏
页码:81 / 86
页数:6
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