Physical and mathematical simulation of plasma-chemical heterogeneous synthesis from plasma fluxes

被引：0
|
作者：
Barvinok, V. A. [1 ]
Bogdanovich, V. I. [1 ]
机构：
[1] Korolev State Univ, Res Inst Technol & Qual Problems, Samara 443086, Russia
来源：
TECHNICAL PHYSICS | 2008年 / 53卷 / 01期
关键词：
52.77.Dq; 81.15.Aa;
D O I：
10.1134/S106378420801012X
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A physicomathematical model of obtaining variable-composition compounds by the ion-plasma method is developed. Specifically, the model is applied to synthesis of titanium nitride coatings. The mathematical part of the model takes into account the basic stages of the process, such as adsorption, desorption, dissociation, chemisorption, accommodation, sputtering, and surface migration. It makes it possible to find the coating growth rate, coating stoichiometry, and packing density of the adlayer as functions of the basic physical parameters of the process.
引用
收藏
页码：64 / 68
页数：5
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