Application of the Digital Holographic Interference Microscopy for Thin Transparent Films Investigation

被引：2
|
作者：
Tishko, Dmitry Nikolayevich [1 ]
Tishko, Tatyana Vasilyevna [1 ]
Titar, Vladimir Petrovich [1 ]
机构：
[1] Kharkov Natl Univ, Radio Phys Dept, Lab Holog, UA-61077 Kharkov, Ukraine
来源：
PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY | 2010年 / 47卷 / 12期
关键词：
D O I：
10.3139/147.110094
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
In this work the digital holographic interference microscope (DHIM) is proposed for investigation of thin transparent films on transparent substrates. The DHIM allows 3D imaging of surfaces of thin transparent films, and measurement of their geometrical parameters (thicknesses, sizes of defects). The method of the holographic interferometry, and the optical layout of the DHIM are described. The experimental results of investigation of thin AlN coatings on acryl substrates are presented.
引用
收藏
页码：719 / 731
页数：13
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