Diagnosis of laser ablation plasma for growth of thin layers

被引:0
|
作者
Basillais, A
Benzerga, R
Le Menn, E
Mathias, J
Boulmer-Leborgne, C
Perrière, J
机构
[1] Univ Orleans, GREMI, F-45067 Orleans 2, France
[2] Univ Paris 06, GPS, F-75251 Paris, France
[3] Univ Paris 07, GPS, F-75251 Paris 05, France
来源
JOURNAL DE PHYSIQUE IV | 2003年 / 108卷
关键词
D O I
10.1051/jp4:20030589
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:29 / 32
页数:4
相关论文
共 50 条
  • [41] THIN-FILM DEPOSITION BY A NEW LASER ABLATION AND PLASMA HYBRID TECHNIQUE
    KRISHNASWAMY, J
    RENGAN, A
    NARAYAN, J
    VEDAM, K
    MCHARGUE, CJ
    APPLIED PHYSICS LETTERS, 1989, 54 (24) : 2455 - 2457
  • [42] Correlation Between Plasma and Copper thin Films Properties Grown by Laser Ablation
    Riascos Landazuri, Henry
    Vera Londono, Liliana Patricia
    Perez Taborda, Jaime Andres
    ENTRE CIENCIA E INGENIERIA, 2011, (09): : 107 - 119
  • [43] a-CN thin film properties as a function of laser ablation plasma parameters
    Escobar-Alarcon, L.
    Arrieta, A.
    Camps, E.
    Romero, S.
    Muhl, S.
    Camacho-Lopez, M. A.
    DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) : 1291 - 1294
  • [44] Carbon nitride thin films obtained by laser ablation of graphite in a nitrogen plasma
    Polo, MC
    Aguiar, R
    Serra, P
    Cleries, L
    Varela, M
    Esteve, J
    APPLIED SURFACE SCIENCE, 1996, 96-8 : 870 - 873
  • [45] Thin films deposition in RF generated plasma by reactive pulsed laser ablation
    Giardini, A
    Marotta, V
    Morone, A
    Orlando, S
    Parisi, GP
    APPLIED SURFACE SCIENCE, 2002, 197 : 338 - 342
  • [46] On the growth mechanism of nanoparticles in plasma during pulsed laser ablation in liquids
    Taccogna, F.
    Dell'Aglio, M.
    Rutigliano, M.
    Valenza, G.
    De Giacomo, A.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2017, 26 (04):
  • [47] Backward growth of plasma induced by long nanosecond laser pulse ablation
    Zhou, Yun
    Tao, Sha
    Wu, Benxin
    APPLIED PHYSICS LETTERS, 2011, 99 (05)
  • [48] EXAMINATION OF CLASSICAL COUPLING OF LASER LIGHT TO THIN, DENSE-PLASMA LAYERS
    OSBORN, RK
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1975, 3 (03) : 116 - 121
  • [49] Laser ablation and deposition of wide bandgap semiconductors: plasma and nanostructure of deposits diagnosis
    Sanz, M.
    Lopez-Arias, M.
    Rebollar, E.
    de Nalda, R.
    Castillejo, M.
    JOURNAL OF NANOPARTICLE RESEARCH, 2011, 13 (12) : 6621 - 6631
  • [50] Laser ablation and deposition of wide bandgap semiconductors: plasma and nanostructure of deposits diagnosis
    M. Sanz
    M. López-Arias
    E. Rebollar
    R. de Nalda
    M. Castillejo
    Journal of Nanoparticle Research, 2011, 13 : 6621 - 6631