A multifunctional electronic skin based on patterned metal films for tactile sensing with a broad linear response range

被引:85
|
作者
Cai, Min [1 ,2 ]
Jiao, Zhongdong [3 ]
Nie, Shuang [1 ,2 ]
Wang, Chengjun [1 ,2 ]
Zou, Jun [3 ,4 ]
Song, Jizhou [1 ,2 ,4 ]
机构
[1] Zhejiang Univ, Soft Matter Res Ctr, Dept Engn Mech, Hangzhou 310027, Peoples R China
[2] Zhejiang Univ, Key Lab Soft Machines & Smart Devices Zhejiang Pr, Hangzhou 310027, Peoples R China
[3] Zhejiang Univ, Sch Mech Engn, Hangzhou 310027, Peoples R China
[4] Zhejiang Univ, State Key Lab Fluid Power & Mechatron Syst, Hangzhou 310027, Peoples R China
来源
SCIENCE ADVANCES | 2021年 / 7卷 / 52期
基金
中国国家自然科学基金;
关键词
BLOOD-PRESSURE; SENSOR ARRAY; SUPPRESSION; DYSPHAGIA; COMPOSITE;
D O I
10.1126/sciadv.abl8313
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Electronic skins (e-skins) with multifunctional sensing functions have attracted a lot of attention due to their promising applications in intelligent robotics, human-machine interfaces, and wearable healthcare systems. Here, we report a multifunctional e-skin based on patterned metal films for tactile sensing of pressure and temperature with a broad linear response range by implementing the single sensing mechanism of piezoresistivity, which allows for the easy signal processing and simple device configuration. The sensing pixel features serpentine metal traces and spatially distributed microprotrusions. Experimental and numerical studies reveal the fundamental aspects of the multifunctional tactile sensing mechanism of the e-skin, which exhibits excellent flexibility and wearable conformability. The fabrication approach being compatible with the well-established microfabrication processes has enabled the scalable manufacturing of a large-scale e-skin for spatial tactile sensing in various application scenarios.
引用
收藏
页数:10
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