Delamination mechanism in relation to adhesion of cubic boron nitride

被引:34
|
作者
Kim, IH [1 ]
Kim, SH [1 ]
Kim, KB [1 ]
机构
[1] Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang 790784, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1998年 / 16卷 / 04期
关键词
D O I
10.1116/1.581412
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The growth and delamination mechanism of cubic boron nitride (c-BN) film on silicon substrate was investigated with Fourier transform infrared (FTIR) spectroscopy and transmission electron microscopy (TEM), c-BN films were prepared by the helicon wave plasma chemical vapor deposition process on (100) Si. The film deposited under the intense impact of energetic ions is usually delaminated from the substrate after deposition. It is found that moisture in the air, as well as severe compressive stress in the film, contribute to him delamination. From FTIR and TEM characterization, a model for the delamination mechanism of c-BN film is suggested. Based on the delamination mechanism, several kinds of remedies such as post-annealing and post-N-2 plasma treatment were carried out to improve the adhesion. The effects of these respective remedies on the adhesion of c-BN film are also discussed. (C) 1998 American Vacuum Society. [S0734-2101(98)05404-9].
引用
收藏
页码:2295 / 2299
页数:5
相关论文
共 50 条
  • [21] Improvement of adhesion of cubic boron nitride films: effect of interlayer and deposition parameters
    He, Q
    Li, CM
    Lu, FX
    Pilione, L
    Messier, RF
    PRICM 5: THE FIFTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-5, 2005, 475-479 : 3635 - 3638
  • [22] On nonstoichiometry of boron cubic nitride
    Inst Sverkhtverdykh Materialov NAN, Ukrainy, Kiev, Ukraine
    Sverkhtverd Mater, 5 (19-22):
  • [23] Semiconducting cubic boron nitride
    Litvinov, D
    Taylor, CA
    Clarke, R
    DIAMOND AND RELATED MATERIALS, 1998, 7 (2-5) : 360 - 364
  • [24] Compressibility of cubic boron nitride
    Sokolovskii, T.D.
    Soviet journal of superhard materials, 1988, 10 (06): : 14 - 16
  • [25] CUBIC BORON-NITRIDE
    BEALE, HA
    INDUSTRIAL RESEARCH & DEVELOPMENT, 1979, 21 (06): : 143 - &
  • [26] CUBIC FORM OF BORON NITRIDE
    WENTORF, RH
    JOURNAL OF CHEMICAL PHYSICS, 1957, 26 (04): : 956 - 956
  • [27] Cheaper cubic boron nitride
    不详
    MATERIALS WORLD, 1999, 7 (02) : 68 - 68
  • [28] Boron suboxide: As hard as cubic boron nitride
    He, DW
    Zhao, YS
    Daemen, L
    Qian, J
    Shen, TD
    Zerda, TW
    APPLIED PHYSICS LETTERS, 2002, 81 (04) : 643 - 645
  • [29] The Adhesion Improvement of Cubic Boron Nitride Film on High Speed Steel Substrate Implanted by Boron Element
    蔡志海
    张平
    谭俊
    JournalofShanghaiJiaotongUniversity, 2005, (04) : 387 - 391
  • [30] Mechanism for diamond growth on hydrogenated {111} surfaces of cubic boron nitride
    Yanagihara, T
    Yomogita, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (9A): : 5229 - 5234