SYNTHESIS AND CHARACTERIZATION OF DIAMOND FILMS ADDED CO2 AND Ar UNDER CH4/H2 ATMOSPHERE

被引：2
|
作者：
Jian, Xiaogang [1 ]
Hu, Jibo [1 ]
机构：
[1] Tongji Univ, Sch Mech Engn, Shanghai 200240, Peoples R China
来源：
SURFACE REVIEW AND LETTERS | 2022年 / 29卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Different reaction gas sources; diamond coatings; WC-Co substrate; friction property; ULTRA-SMOOTH; CVD DIAMOND; WC-CO; GROWTH; NITROGEN; DEPOSITION; SILICON; POWER;
D O I：
10.1142/S0218625X22500123
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Diamond coating was widely used in various fields because of its high performance. The study was used to describe the performance analysis of coatings prepared by CH4/H-2, CH4/H-2/CO2, CH4/H-2/Ar, CH4/H-2/CO2/Ar and analyze it by scanning electron microscopy (SEM), Raman spectrum, X-ray diffraction (XRD) and tribological experiments. The results showed that the addition of CO2 and Ar was beneficial for the preparation of coatings with smaller grain size and the friction performance was reduced, but the coating quality of nanodiamond coatings was better.
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页数：7
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