Dual-wavelength Digital Holography Microscope for BGA Measurement Using Partial Coherence Sources

被引：10

作者：

Cho, Hyungjun ^{[1
]}

Kim, Doocheol ^{[1
]}

Yu, Younghun ^{[1
]}

Jung, Wonki ^{[2
]}

Shin, Sanghoon ^{[3
]}

机构：

[1] Jeju Natl Univ, Dept Phys, Cheju 690756, South Korea

[2] Jeonju Univ, Sch Elect Engn, Jeonju 560759, South Korea

[3] AP & Tec, Seoul 135539, South Korea

来源：

JOURNAL OF THE OPTICAL SOCIETY OF KOREA | 2011年 / 15卷 / 04期

关键词：

Digital holography; Dual-wavelength holography; Error reduction; COMPENSATION;

D O I：

10.3807/JOSK.2011.15.4.352

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Dual-wavelength holography has a better axial range than single-wavelength holography, allowing unambiguous phase imaging. Partial coherence sources reduce coherent noise, resulting in improved reconstructed images. We measured a ball-grid array using dual-wavelength holography with partial coherence sources. This holography method is useful for measurement samples that exhibit coherence noise and have a step height larger than the single wavelength used in holography.

引用

页码：352 / 356

页数：5

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