Tunable High Quality-Factor Silicon Microring Resonator Driven by High-Mobility Transparent Conductive Oxide

被引：0
|
作者：
Hsu, Wei-Che [1 ]
Zhen, Cheng [1 ]
Wang, Alan X. [1 ]
机构：
[1] Oregon State Univ, Sch Elect Engn & Comp Sci, Corvallis, OR 97331 USA
来源：
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2021年
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MODULATOR;
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrated a silicon microring resonator driven by a titanium-doped indium oxide capacitor with 10 nm hafnium oxide insulator, achieving a high quality-factor of 11,700 with a high electro-optic tunability of 120 pm/V. (C) 2021 The Author(s)
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