Frequency Stability of RF-MEMS Disk Resonators

被引：12
|
作者：
Yuan, Quan [1 ,2 ]
Luo, Wei [1 ,2 ]
Zhao, Hui [1 ,2 ]
Peng, Bohua [1 ,2 ]
Yang, Jinling [1 ,2 ]
Yang, Fuhua [1 ,2 ]
机构：
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Transducer Technol, Beijing 100083, Peoples R China
[2] Shanghai Inst Tech Phys, State Key Lab Transducer Technol, Shanghai 200083, Peoples R China
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 2015年 / 62卷 / 05期
基金：
中国国家自然科学基金;
关键词：
Frequency stability; microelectromechanical system (MEMS) oscillator; phase noise; temperature compensation;
D O I：
10.1109/TED.2015.2415199
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper systematically investigates the frequency stability of a radial-contour-mode micromechanical disk resonators with high quality factor (Q-factor) and high resonance frequency. Microelectromechanical system (MEMS)-based oscillator prototype consisting of the resonator and off-chip circuit is realized for frequency reference. The sustaining circuit is designed using impedance matching networks and two op-amp stages with automatic gain control circuit. The oscillator reaches a short-term frequency stability of +/- 1 ppm and a medium-term frequency stability of +/- 5 ppm over industrial temperature range (-40 degrees C-85 degrees C), which outperforms some of the best MEMS oscillators. Meanwhile, the phase noise is -95 dBc/Hz at 10 kHz offset and 149-MHz carrier. This paper also presents a simple and effective compensation scheme by combining built-in microoven and bias voltage tuning, which can achieve a frequency stability range of 2 ppm at temperature ranges from 20 degrees C to 100 degrees C.
引用
收藏
页码：1603 / 1608
页数：6
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