Influence of Cr and Si Addition on Structural and Mechanical Properties of TiAlN Coatings Reactively Sputter Deposited

被引：1

作者：

Dehlinger, Anne-Sophie ^{[1
]}

Lapostolle, Frederic ^{[1
]}

Lamy, Sophie ^{[1
]}

Rapaud, Olivier ^{[1
]}

Meunier, Cathy ^{[2
]}

Brien, Valerie ^{[3
]}

Klein, Didier ^{[1
]}

Coddet, Christian ^{[1
]}

机构：

[1] UTBM, Lab Etudes & Rech Mat Procedes & Surfaces LERMPS, Belfort 90010, France

[2] UFC, Ctr Rech Ecoulements Surfaces & Transferts, F-25211 Montbeliard, France

[3] CNRS, Lab Phys Milieux Ionises & Applicat, UMR 7040, F-54506 Vandoeuvre Les Nancy, France

来源：

PLASMA PROCESSES AND POLYMERS | 2007年 / 4卷

关键词：

magnetron; sputtering; thin films; nitrides; ceramics; oxidation; hardness; scratch test;

D O I：

10.1002/ppap.200731411

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The possibilities offered by magnetron sputtering to obtain Si and Cr enriched (Ti-x,Al-y)N coatings are presented, correlating coatings properties to the deposition parameters. After a theoretical study of the sputtering conditions, the coatings deposition was achieved using a TiAl (50-50 at%) target, with Cr and Si inserts distributed onto its erosion track in order to reach the desired composition. Composition and structural evolution were determined by means of GDOES and XRD. Oxidation resistance of the coatings, as a function of structure and composition, was tested at 900 degrees C. Mechanical tests were performed by means of unidirectional multi-pass scratch testing under constant load showing interesting performances.

引用

页码：S588 / S592

页数：5

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