A Fully Integrated CMOS Nanoscale Biosensor Microarray

This paper presents a fully integrated CMOS microarray for biosensor applications. A 64-pixel working electrode array with optimized reference and counter electrode structure is proposed to improve symmetry, and the feature sizes of electrodes have been scaled down to 600nm. The circuit utilizes the decoding scheme of memories to simplify the pixel design while shares potentiostat opamp and current amplifers, which allows the miniaturization of electrodes and enables large-scale integration of the microarray. The demo is fabricated in 0.18 mu m CMOS technology, and experimental results successfully demonstrated the biosensing detections on the nanoscale microarray. The circuit provides a current gain of 19.9dB, 3dB bandwidth of 15kHz, dynamic range of 141dB, sensing sensitivity of 37.6pA, and a driving capability of 0.46mA, respectively.