Dielectric Enhancement Effect in (Ba0.7Sr0.3TiO3/Ba0.5Sr0.5TiO3)n (n=1,2,3,4) Multilayered Thin Films Deposited by Chemical Solution Deposition Method

被引：0

作者：

Fu, Yankun ^{[1
,2
,3
]}

Chang, Qing ^{[1
,2
]}

Liu, Qiangchun ^{[1
,2
,4
]}

Dai, Jianming ^{[1
,2
,4
]}

Wu, Dajun ^{[1
,2
]}

Zhu, Xuebin ^{[1
,2
]}

Zhang, Weijie ^{[1
,2
]}

Sun, Yuping ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Key Lab Mat Phys, Inst Solid State Phys, Hefei 230031, Peoples R China

[2] Chinese Acad Sci, Hefei High Magnet Field Lab, Hefei 230031, Peoples R China

[3] Shandong Univ Sci & Technol, Qingdao 266510, Peoples R China

[4] Huaibei Normal Univ, Sch Phys & Elect Informat, Huaibei 235000, Peoples R China

来源：

INTEGRATED FERROELECTRICS | 2012年 / 135卷

关键词：

Barium strontium titanate; Chemical solution deposition; Multilayered thin films; Dielectric enhancement; PULSED-LASER DEPOSITION; SOL-GEL METHOD; SUPERLATTICE STRUCTURES; IMPROVEMENT;

D O I：

10.1080/10584587.2012.685412

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Multilayered Ba0.7Sr0.3TiO3/Ba0.5Sr0.5TiO3 (BST0.7/0.5)(n) (n = 1, 2, 3 and 4, respectively) thin films with different layered periods are prepared on Pt/TiO2/SiO2/Si substrates by chemical solution deposition method. The microstructure and dielectric properties of the films are investigated systematically. Obvious dielectric enhancement occurs in (BST0.7/0.5)(n) multilayer comparing with Ba0.5Sr0.5TiO3 and Ba0.7Sr0.3TiO3 monolayered thin films due to Maxwell-Wagner effect. On the other hand, strain and grain sizes of the multilayered thin films can also affect the dielectric properties. Specially, the (BST0.7/0.5)(2) shows the best dielectric properties with dielectric constant of 557, loss tangent of 0.025 and tunability of 46% at 200 KHz, which is beneficial in applications.

引用

页码：94 / 102

页数：9

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