Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing

被引：206

作者：

Liao, Yang ^{[2
]}

Song, Jiangxin ^{[2
]}

Li, En ^{[3
]}

Luo, Yong ^{[1
]}

Shen, Yinglong ^{[2
]}

Chen, Danping ^{[2
]}

Cheng, Ya ^{[2
]}

Xu, Zhizhan ^{[2
]}

Sugioka, Koji ^{[4
]}

Midorikawa, Katsumi ^{[4
]}

机构：

[1] Dalian Univ Technol, Sch Pharmaceut Sci & Technol, Dalian 116024, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[3] Nankai Univ, Coll Phys Sci, Tianjin 300071, Peoples R China

[4] RIKEN, Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan

来源：

LAB ON A CHIP | 2012年 / 12卷 / 04期

基金：

中国国家自然科学基金;

关键词：

DEVICE; CHIP; MICROMIXERS; NETWORKS; CHANNEL; SYSTEMS; SILICA; PULSES;

D O I：

10.1039/c2lc21015k

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

The creation of complex three-dimensional (3D) microfluidic systems has attracted significant attention from both scientific and applied research communities. However, it is still a formidable challenge to build 3D microfluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. Here, we demonstrate rapid fabrication of high-aspect-ratio microfluidic channels with various 3D configurations in glass substrates by femtosecond laser direct writing. Based on this approach, we demonstrate a 3D passive microfluidic mixer and characterize its functionalities. This technology will enable rapid construction of complex 3D microfluidic devices for a wide array of lab-on-a-chip applications.

引用

页码：746 / 749

页数：4

共 50 条

[31] Three-dimensional direct laser writing of biomimetic neuron structures
Yu, Haoyi
Zhang, Qiming
Gu, Min
OPTICS EXPRESS, 2018, 26 (24): : 32111 - 32117
[32] A three dimensional model for direct laser metal powder deposition and rapid prototyping
Labudovic, M
Hu, D
Kovacevic, R
JOURNAL OF MATERIALS SCIENCE, 2003, 38 (01) : 35 - 49
[33] A three dimensional model for direct laser metal powder deposition and rapid prototyping
M. Labudovic
D. Hu
R. Kovacevic
Journal of Materials Science, 2003, 38 : 35 - 49
[34] Three-dimensional bioactive glass implants fabricated by rapid prototyping based on CO2 laser cladding
Comesana, R.
Lusquinos, F.
del Val, J.
Lopez-Alvarez, M.
Quintero, F.
Riveiro, A.
Boutinguiza, M.
de Carlos, A.
Jones, J. R.
Hill, R. G.
Pou, J.
ACTA BIOMATERIALIA, 2011, 7 (09) : 3476 - 3487
[35] Three-dimensional microoptical components embedded in Foturan glass by a femtosecond laser
Cheng, Y
Sugioka, K
Masuda, M
Shihoyama, K
Toyoda, K
Midorikawa, K
FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 103 - 107
[36] Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam
Yang Liao
Jia Qi
Peng Wang
Wei Chu
Zhaohui Wang
Lingling Qiao
Ya Cheng
Scientific Reports, 6
[37] Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam
Liao, Yang
Qi, Jia
Wang, Peng
Chu, Wei
Wang, Zhaohui
Qiao, Lingling
Cheng, Ya
SCIENTIFIC REPORTS, 2016, 6
[38] Optical tuning of three-dimensional photonic crystals fabricated by femtosecond direct writing
McPhail, D
Straub, M
Gu, M
APPLIED PHYSICS LETTERS, 2005, 87 (09)
[39] Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing
Cheng, C. W.
Chen, J. S.
Lee, P. X.
Chien, C. W.
ADVANCES IN ABRASIVE TECHNOLOGY XIII, 2010, 126-128 : 394 - +
[40] Direct writing of three-dimensional Cu-based sensors using femtosecond laser reduction of CuO nanoparticles
Mizoshiri, Mizue
Hata, Seiichi
LASER-BASED MICRO- AND NANOPROCESSING XII, 2018, 10520

← 1 2 3 4 5 →