Hands-on classroom photolithography laboratory module to explore nanotechnology

被引：4
|
作者：
Stelick, SJ [1 ]
Alger, WH [1 ]
Laufer, JS [1 ]
Waldron, AM [1 ]
Batt, CA [1 ]
机构：
[1] Cornell Univ, Nanobiotechnol Ctr, Ithaca, NY 14850 USA
来源：
JOURNAL OF CHEMICAL EDUCATION | 2005年 / 82卷 / 09期
关键词：
D O I：
10.1021/ed082p1361
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
[No abstract available]
引用
收藏
页码：1361 / 1364
页数：4
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