Effects of annealing temperature on the photoluminescence of RF sputtered Barium titanate thin films

被引:10
|
作者
Maneeshya, L. V. [1 ]
Thomas, P. V. [1 ]
Joy, K. [1 ]
机构
[1] Mar Ivanios Coll, Thin Film Lab, Post Grad & Res Dept Phys, Thiruvananthapuram 695015, Kerala, India
关键词
Thin films; BaTiO3; RF magnetron sputtering; Photoluminescence; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; BATIO3; EVOLUTION; DEFECTS;
D O I
10.1016/j.mssp.2014.08.048
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
BaTiO3 thin films were deposited onto quartz substrates by an RF magnetron sputtering method. The films deposited at room temperature and annealed at 773-1173 K were characterized using X-ray diffraction (XRD)Scanning electron microscopy (SEM), UV-vis spectroscopy and Photoluminescence spectroscopy (PL). X-ray diffraction studies revealed that the film is amorphous in nature at 773 K and that the crystallinity increases with increase in annealing temperature. The average crystallite size of the films increased from 13-18 nm and the optical band gap decreased in the range of 4.33-3.43 eV, with increase in annealing temperature. The films exhibited good adherence to the substrates and the SEM images showed smooth surface morphology. Energy dispersive X-ray (EDX) analysis confirmed the presence of barium, titanium and oxygen in the film. The red-shifts of excitonic UV emission peaks were observed in all samples which can be attributed to the stress produced due to lattice distortions. The visible PL emission intensity showed appreciable enhancement with post-deposition annealing. (C) 2014 Elsevier Ltd. All rights reserved.
引用
收藏
页码:688 / 693
页数:6
相关论文
共 50 条
  • [21] The Effect of Deposition Time on Sputtered Barium Strontium Titanate Thin Films
    Jamaluddin, F. W.
    Khalid, M. F.
    Mamat, M. H.
    Zoolfakar, A. S.
    2017 IEEE 13TH MALAYSIA INTERNATIONAL CONFERENCE ON COMMUNICATIONS (MICC), 2017, : 63 - 65
  • [22] Sputtered barium titanate and barium strontium titanate films for capacitor applications
    Tsao, BH
    Heidger, S
    Weimer, JA
    PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II, 2001, : 837 - 840
  • [23] RF-SPUTTERED TRANSPARENT FERROELECTRIC THIN-FILMS OF BARIUM-TITANATE (BATIO3)
    SREENIVAS, K
    MANSINGH, A
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1986, 33 (06) : 821 - 821
  • [24] STRUCTURAL AND ELECTRICAL-PROPERTIES OF RF-SPUTTERED AMORPHOUS BARIUM-TITANATE THIN-FILMS
    SREENIVAS, K
    MANSINGH, A
    SAYER, M
    JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) : 4475 - 4481
  • [25] Annealing effect in DC and RF sputtered ITO thin films
    Kerkache, L.
    Layadi, A.
    Dogheche, E.
    Remiens, D.
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2007, 39 (01): : 1 - 5
  • [26] Effect of annealing temperature on the microstructure of barium strontium titanate films
    Liao, Jiaxuan
    Li, Enqiu
    Tian, Zhong
    Xu, Jiang
    Yang, Haiguang
    HIGH-PERFORMANCE CERAMICS V, PTS 1 AND 2, 2008, 368-372 : 56 - 58
  • [27] RF SPUTTERED STRONTIUM TITANATE FILMS
    PENNEBAKER, WB
    IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1969, 13 (06) : 686 - +
  • [28] Effect of annealing on molybdenum doped indium oxide thin films RF sputtered at room temperature
    Elangovan, E.
    Marques, A.
    Pimentel, A.
    Martins, R.
    Fortunato, E.
    VACUUM, 2008, 82 (12) : 1489 - 1494
  • [29] Sputtered barium titanate films for capacitor applications
    Tsao, BH
    Carr, SF
    Weimer, JA
    AMORPHOUS AND CRYSTALLINE INSULATING THIN FILMS - 1996, 1997, 446 : 343 - 348
  • [30] Sputtered barium titanate films for capacitor applications
    Tsao, BH
    Carr, SF
    Weimer, JA
    IECEC 96 - PROCEEDINGS OF THE 31ST INTERSOCIETY ENERGY CONVERSION ENGINEERING CONFERENCE, VOLS 1-4, 1996, : 560 - 565