Fourier transform infrared spectroscopic study of nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by pulsed laser deposition

被引:10
|
作者
Al-Riyami, Sausan [1 ]
Ohmagari, Shinya [1 ]
Yoshitake, Tsuyoshi [1 ]
机构
[1] Kyushu Univ, Dept Appl Sci Elect & Mat, Fukuoka 8168580, Japan
关键词
Ultrananocrystalline diamond; Nitrogen-doping; FTIR; Pulsed laser deposition; n-type conduction; THIN-FILMS; DIAMOND; NITRIDE; GROWTH; NANOCRYSTALLINE; HYDROGEN;
D O I
10.1016/j.diamond.2011.03.023
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nitrogen-doped ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films, which possess n-type conduction with enhanced electrical conductivities, were prepared by pulsed laser deposition and they were structurally studied by Fourier transform infrared (FTIR) spectroscopy. The film with a nitrogen content of 7.9 at.% possessed n-type condition with an electrical conductivity of 18 S/cm at 300 K. The FTIR spectra revealed peaks due to nitrogen impurities, C=N, C-N, and CHn (n = 1, 2, 3) bands. The sp(2)-CHn/(sp(2)-CHn + sp(3)-CHn), estimated from the area-integration of decomposed peaks, were 24.5 and 19.4% for undoped and 7.9 at.% doped films, respectively. The nitrogen-doping not only form the chemical bonds between carbon and nitrogen atoms such as C=N and C-N bonds but also facilitate the formation of both sp(2) and sp(3) bonds, in particular, the sp(3)-CHn bond is preferentially formed. From the analysis of the FTIR spectra, it was found that the hydrogen content in the film is increased with an increase in the nitrogen content. The increased hydrogen content might be owing to the enhanced volume of grain boundaries (CBs) between UNCD grains, and those between UNCD grains and an a-C:H matrix, which is caused by a reduction in the UNCD grain size. The CHn peaks predominantly come from an a-C:H matrix and CBs. Since the nitrogen-doping for a-C:H has been known to be hardly effective, the n-type conduction with the enhanced electrical conductivities might be attributed to the sp(2)-CHn formation at the CBs. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:1072 / 1075
页数:4
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