Selectivity in high-temperature operated semiconductor gas-sensors

被引:90
|
作者
Fleischer, M [1 ]
Meixner, H [1 ]
机构
[1] Siemens AG, Corp Res & Dev, Dept ZT KM 2, D-81739 Munich, Germany
关键词
gas sensor; semiconducting metal oxides; high temperature; Ga2O3; selectivity; gas filters; thin films; thick films;
D O I
10.1016/S0925-4005(98)00271-8
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
High-temperature operated metal oxides like Ga2O3 developed in the last years show certain advantages like reproducibility and robustness resulting from a conduction mechanism which is independent on grain boundary effects. But similar to the lower temperature operated oxides like SnO2 and ZnO they also possess broad band sensitivity characteristics, i.e. they respond to all gases with similar chemical properties. This paper shows to which extent strategies to achieve selective gas detection with one single sensor are applicable with these metal oxides. Temperature variations, surface modifications and the use of physical and chemical filters directly attached to the sensor surface are discussed in this paper. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:179 / 187
页数:9
相关论文
共 50 条
  • [31] Temperature Drift Identification in Semiconductor Gas Sensors
    Abidin, M. Z.
    Asmat, Arnis
    Hamidon, M. N.
    2014 IEEE CONFERENCE ON SYSTEMS, PROCESS AND CONTROL (ICSPC 2014), 2014, : 63 - 67
  • [32] Siloxane treatment of metal oxide semiconductor gas sensors in temperature-cycled operation - sensitivity and selectivity
    Schultealbert, Caroline
    Uzun, Iklim
    Baur, Tobias
    Sauerwald, Tilman
    Schutze, Andreas
    JOURNAL OF SENSORS AND SENSOR SYSTEMS, 2020, 9 (02) : 283 - 292
  • [33] Methods to investigate the temperature distribution of heated ceramic gas sensors for high-temperature applications
    Woehrl, Thomas
    Herrmann, Julia
    Kita, Jaroslaw
    Moos, Ralf
    Hagen, Gunter
    JOURNAL OF SENSORS AND SENSOR SYSTEMS, 2023, 12 (02) : 205 - 214
  • [34] Selective gas detection with high-temperature operated metal oxides using catalytic filters
    Fleischer, M
    Kornely, S
    Weh, T
    Frank, J
    Meixner, H
    SENSORS AND ACTUATORS B-CHEMICAL, 2000, 69 (1-2) : 205 - 210
  • [35] Vibronic effects as a clue to the solution of the selectivity problem of semiconductor gas sensors
    Gutman, EE
    Kiselev, VF
    Plotnikov, GS
    SENSORS AND ACTUATORS B-CHEMICAL, 1997, 44 (1-3) : 468 - 473
  • [36] Improving the selectivity of semiconductor gas sensors using the pulse adsorption mode
    Skutin, ED
    Budanova, EM
    Leshchinskii, SS
    JOURNAL OF ANALYTICAL CHEMISTRY, 2004, 59 (12) : 1142 - 1145
  • [37] SELECTIVITY STUDIES ON TIN OXIDE-BASED SEMICONDUCTOR GAS SENSORS
    COLES, GSV
    WILLIAMS, G
    SMITH, B
    SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (01) : 7 - 14
  • [38] Improving the Selectivity of Semiconductor Gas Sensors Using the Pulse Adsorption Mode
    E. D. Skutin
    E. M. Budanova
    S. S. Leshchinskii
    Journal of Analytical Chemistry, 2004, 59 : 1142 - 1145
  • [39] Thin-film gas sensors based on high-temperature-operated metal oxides
    Fleischer, M
    Meixner, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (04): : 1866 - 1872
  • [40] A Robust, High-Temperature Organic Semiconductor
    Kintigh, Jeremy T.
    Hodgson, Jennifer L.
    Singh, Anup
    Pramanik, Chandrani
    Larson, Amanda M.
    Zhou, Lei
    Briggs, Jonathan B.
    Noll, Bruce C.
    Kheirkhahi, Erfan
    Pohl, Karsten
    McGruer, Nicol E.
    Miller, Glen P.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2014, 118 (46): : 26955 - 26963