A study of surface acoustic wave pressure sensor in ZnO/quartz structure

被引：3

作者：

Talbi, A ^{[1
]}

Elhakiki, M ^{[1
]}

Sarry, F ^{[1
]}

Elmazria, O ^{[1
]}

Le Brizoual, L ^{[1
]}

Alnot, P ^{[1
]}

机构：

[1] CNRS, UMR 7040, Lab Phys Milieux Ionises & Applicat, F-75700 Paris, France

来源：

PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年

关键词：

SAW; ZnO; quartz; Y-X cut; TCF; K-2;

D O I：

10.1109/ICSENS.2004.1426223

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It was previously reported that a Rayleigh wave propagating on a zinc oxide film has a relatively low temperature coefficient of frequency (TCF) and a large electromechanical coupling factor (K-2). In this study we investigate the performance of SAW pressure sensor using ZnO/Quartz structure. Y-cut is prefered in our study due to its positive TCF value permitting a zero TCF when combined with ZnO. ZnO thickness was determined to achieve a zero TCF and to improve the electromechanical coupling coefficient (K-2 = 1%) seven times higher than that of quartz Y-cut X propagating direction. The developemnt of the optimale structure to be used is presented folowing by a discussion including the operating frequency effect and ZnO film contribution to the pressure sensitivity.

引用

页码：550 / 553

页数：4

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